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Euv Lithography (Hardcover)

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Product Overview

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

Specifications

Publisher John Wiley & Sons Inc
Mfg Part# 9780470471555
SKU 210676407
Format Hardcover
ISBN10 0470471557
Release Date 3/9/2009
Product Attributes
Book Format Hardcover
Number of Pages 0700
Publisher John Wiley & Sons
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