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Handbook of Chemical Vapor Deposition : Principles, Technology, and Applications (Hardcover)

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Product Overview

Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations.

Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors.

This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.


Publisher Noyes Pubns
Mfg Part# 9780815513001
SKU 203383248
Format Hardcover
ISBN10 0815513003
Release Date 8/30/2010
Product Attributes
Book Format Hardcover
Number of Pages 0458
Publisher William Andrew Publishing
$154.80 + $2.75 shipping
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