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Microelectronic Applications of Chemical Mechanical Planarization (Hardcover)

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Product Overview

"Microelectronic Applications Using Chemical Mechanical Planarization" provides a systematic and comprehensive description of current CMP technology used in high-tech products such as video games, portable communications devices, and high-speed computers. It covers includes new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and technologies like MEMS (Micro-Electro-Mechanical Systems). It also covers fundamentals and basic science, making it an ideal introduction for CMP newcomers and a valuable reference for professionals.


Publisher John Wiley & Sons Inc
Mfg Part# 9780471719199
SKU 204545272
Format Hardcover
ISBN10 0471719196
Release Date 10/31/2011
Product Attributes
Book Format Hardcover
Number of Pages 0734
Publisher Wiley-Interscience
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