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Surfaces, Interfaces, and Thin Films for Microelectronics (Hardcover)

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Product Overview

The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.

Specifications

Publisher Wiley-Interscience
Mfg Part# 9780470174470
SKU 206554681
Format Hardcover
ISBN10 0470174471
Release Date 3/4/2013
Product Attributes
Book Format Hardcover
Number of Pages 0515
Publisher Wiley-Interscience
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