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Manufacturing Techniques for Microfabrication and Nanotechnology (Hardcover)

Author: Madou, Marc J.

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Product Overview

Authored by Marc Madou, bestselling author and leading expert in mems and manufacturing at the nano scale, this textbook focuses on emerging trends in industrial lithography and pattern transfer. It covers photolithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. The author also explains thermal, electrothermal, and mechanical removing techniques. Designed for chemistry and materials students, it includes extensive references and a comprehensive glossary and provides worked out problems, along with end of chapter problems. PowerPoint slides and solutions are available for qualifying instructors.

Multi/Card Deck Copy


Publisher Taylor & Francis
Mfg Part# 9781420055191
SKU 203963114
Format Hardcover
ISBN10 1420055194
Release Date 8/13/2012
Product Attributes
Book Format Hardcover
Edition 0003
Number of Pages 0670
Publisher CRC Press
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