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Reactive Sputter Deposition (Hardcover)

Author: Depla, D. (EDT)

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Product Overview

In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

Specifications

Publisher Springer
Mfg Part# 9783540766629
SKU 206146544
Format Hardcover
ISBN10 3540766626
Release Date 5/1/2008
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