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Soft X-Rays And Extreme Ultraviolet Radiation : Principles And Applications (Paperback)

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Product Overview

This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.

Specifications

Publisher Cambridge Univ Pr
Mfg Part# 9780521029971
SKU 202843844
Format Paperback
ISBN10 052102997X
Release Date 4/10/2007
Product Attributes
eBooks Kobo
Book Format Paperback
Number of Pages 0470
Publisher Cambridge University Press
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